Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral elec...
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sg-ntu-dr.10356-977112020-03-07T13:19:26Z Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode Shen, Zhiyuan Olfatnia, Mohammad Miao, Jianmin Wang, Zhihong School of Mechanical and Aerospace Engineering This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. A double-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6 nm V−1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. 2013-07-23T03:47:26Z 2019-12-06T19:45:46Z 2013-07-23T03:47:26Z 2019-12-06T19:45:46Z 2012 2012 Journal Article Shen, Z., Olfatnia, M., Miao, J., & Wang, Z. (2012). Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode. Smart Materials and Structures, 21(5). 0964-1726 https://hdl.handle.net/10356/97711 http://hdl.handle.net/10220/12044 10.1088/0964-1726/21/5/055001 en Smart materials and structures © 2012 IOP Publishing Ltd. |
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This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. A double-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6 nm V−1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. |
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School of Mechanical and Aerospace Engineering |
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School of Mechanical and Aerospace Engineering Shen, Zhiyuan Olfatnia, Mohammad Miao, Jianmin Wang, Zhihong |
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Shen, Zhiyuan Olfatnia, Mohammad Miao, Jianmin Wang, Zhihong |
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Shen, Zhiyuan Olfatnia, Mohammad Miao, Jianmin Wang, Zhihong Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode |
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Shen, Zhiyuan |
title |
Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode |
title_short |
Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode |
title_full |
Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode |
title_fullStr |
Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode |
title_full_unstemmed |
Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode |
title_sort |
displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode |
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2013 |
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https://hdl.handle.net/10356/97711 http://hdl.handle.net/10220/12044 |
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1681037838349500416 |