Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode

This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral elec...

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Main Authors: Shen, Zhiyuan, Olfatnia, Mohammad, Miao, Jianmin, Wang, Zhihong
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/97711
http://hdl.handle.net/10220/12044
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-977112020-03-07T13:19:26Z Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode Shen, Zhiyuan Olfatnia, Mohammad Miao, Jianmin Wang, Zhihong School of Mechanical and Aerospace Engineering This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. A double-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6 nm V−1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. 2013-07-23T03:47:26Z 2019-12-06T19:45:46Z 2013-07-23T03:47:26Z 2019-12-06T19:45:46Z 2012 2012 Journal Article Shen, Z., Olfatnia, M., Miao, J., & Wang, Z. (2012). Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode. Smart Materials and Structures, 21(5). 0964-1726 https://hdl.handle.net/10356/97711 http://hdl.handle.net/10220/12044 10.1088/0964-1726/21/5/055001 en Smart materials and structures © 2012 IOP Publishing Ltd.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
description This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. A double-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6 nm V−1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Shen, Zhiyuan
Olfatnia, Mohammad
Miao, Jianmin
Wang, Zhihong
format Article
author Shen, Zhiyuan
Olfatnia, Mohammad
Miao, Jianmin
Wang, Zhihong
spellingShingle Shen, Zhiyuan
Olfatnia, Mohammad
Miao, Jianmin
Wang, Zhihong
Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
author_sort Shen, Zhiyuan
title Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
title_short Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
title_full Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
title_fullStr Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
title_full_unstemmed Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
title_sort displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
publishDate 2013
url https://hdl.handle.net/10356/97711
http://hdl.handle.net/10220/12044
_version_ 1681037838349500416