Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode

• Main Authors: Shen, Zhiyuan, Olfatnia, Mohammad, Miao, Jianmin, Wang, Zhihong
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/97711; http://hdl.handle.net/10220/12044
• Institution: Nanyang Technological University

This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral elec...