Ab initio variational transition state theory and master equation study of the reaction (OH)3SiOCH2 + CH3 ⇌ (OH)3SiOC2H5
In this paper we use variable reaction coordinate variational transition state theory (VRC-TST) to calculate the reaction rate constants for the two reactions, R1: (OH)3SiOCH2 + CH3 ⇌ (OH)3SiOC2H5, and R2: CH2OH + CH3 ⇌ C2H5OH. The first reaction is an important channel during the thermal decomposit...
Saved in:
Main Authors: | Nurkowski, Daniel, Klippenstein, Stephen J., Georgievskii, Yuri, Verdicchio, Marco, Jasper, Ahren W., Akroyd, Jethro, Mosbach, Sebastian, Kraft, Markus |
---|---|
其他作者: | School of Chemical and Biomedical Engineering |
格式: | Article |
語言: | English |
出版: |
2015
|
主題: | |
在線閱讀: | https://hdl.handle.net/10356/98118 http://hdl.handle.net/10220/25660 |
標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
機構: | Nanyang Technological University |
語言: | English |
相似書籍
-
Study of process dependent reliability in SiOC dielectric interconnects and film
由: Mok, T.S., et al.
出版: (2014) -
Low dielectric constant a-SiOC:H films as copper diffusion barrier
由: Koh, Y.W., et al.
出版: (2014) -
Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects
由: Ngwan, V.C., et al.
出版: (2014) -
Fabrication of polymer-derived SiOC/carbon composites using PμSL
由: Pek, Shaun Yue Zheng
出版: (2023) -
Theoretical Study of the Ti–Cl Bond Cleavage Reaction in TiCl4
由: Nurkowski, Daniel, et al.
出版: (2017)