An on-chip opto-mechanical accelerometer

An on-chip opto-mechanical accelerometer

Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their pr...

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Main Authors: Dong, Bin, Kwong, Dim Lee, Cai, H., Tsai, J. M., Liu, A. Q.
Other Authors: School of Electrical and Electronic Engineering
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:https://hdl.handle.net/10356/98680
http://hdl.handle.net/10220/17546
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Institution: Nanyang Technological University
Language: English
id sg-ntu-dr.10356-98680
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spelling sg-ntu-dr.10356-986802020-03-07T13:24:48Z An on-chip opto-mechanical accelerometer Dong, Bin Kwong, Dim Lee Cai, H. Tsai, J. M. Liu, A. Q. School of Electrical and Electronic Engineering IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation. 2013-11-08T08:48:43Z 2019-12-06T19:58:24Z 2013-11-08T08:48:43Z 2019-12-06T19:58:24Z 2013 2013 Conference Paper Dong, B., Cai, H., Tsai, J. M., Kwong, D. L., & Liu, A. Q. (2013). An on-chip opto-mechanical accelerometer. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp.641-644. https://hdl.handle.net/10356/98680 http://hdl.handle.net/10220/17546 10.1109/MEMSYS.2013.6474323 en
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Dong, Bin
Kwong, Dim Lee
Cai, H.
Tsai, J. M.
Liu, A. Q.
An on-chip opto-mechanical accelerometer
description Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Dong, Bin
Kwong, Dim Lee
Cai, H.
Tsai, J. M.
Liu, A. Q.
format Conference or Workshop Item
author Dong, Bin
Kwong, Dim Lee
Cai, H.
Tsai, J. M.
Liu, A. Q.
author_sort Dong, Bin
title An on-chip opto-mechanical accelerometer
title_short An on-chip opto-mechanical accelerometer
title_full An on-chip opto-mechanical accelerometer
title_fullStr An on-chip opto-mechanical accelerometer
title_full_unstemmed An on-chip opto-mechanical accelerometer
title_sort on-chip opto-mechanical accelerometer
publishDate 2013
url https://hdl.handle.net/10356/98680
http://hdl.handle.net/10220/17546
_version_ 1681049798198689792

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