An on-chip opto-mechanical accelerometer

Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their pr...

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Bibliographic Details
Main Authors: Dong, Bin, Kwong, Dim Lee, Cai, H., Tsai, J. M., Liu, A. Q.
Other Authors: School of Electrical and Electronic Engineering
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/98680
http://hdl.handle.net/10220/17546
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Institution: Nanyang Technological University
Language: English
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