An on-chip opto-mechanical accelerometer
Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their pr...
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Main Authors: | Dong, Bin, Kwong, Dim Lee, Cai, H., Tsai, J. M., Liu, A. Q. |
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Other Authors: | School of Electrical and Electronic Engineering |
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/98680 http://hdl.handle.net/10220/17546 |
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Institution: | Nanyang Technological University |
Language: | English |
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