Thermal conductivity of titanium aluminum silicon nitride coatings deposited by lateral rotating cathode arc

A series of physical vapour deposition titanium aluminum silicon nitride nanocomposite coating with a different (Al + Si)/Ti atomic ratio, with a thickness of around 2.5 μm were deposited on stainless steel substrate by a lateral rotating cathode arc process in a flowing nitrogen atmosphere. The com...

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Bibliographic Details
Main Authors: Ding, X. Z., Cheong, J. Y., Samani, M. K., Amini, Shahrouz, Khosravian, Narjes, Tay, Beng Kang, Chen, Gang
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/98732
http://hdl.handle.net/10220/17477
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Institution: Nanyang Technological University
Language: English