Effects of N2 pressure on properties of titanium nitride films by filter cathodic vacuum arc for bipolar plates in PEM fuel cells
This research is aimed to synthesize titanium nitride (TiN) thin films on stainless steel 304 using metal vacuum arc surface coating technique. A titanium rod is used as cathode. Plasma is generated by applying the arc pulse voltage of 450 V between the electrodes in N2 atmosphere. The pressure of N...
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Main Authors: | , , |
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Format: | Book Series |
Published: |
2017
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Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=81255144912&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/42922 |
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Institution: | Chiang Mai University |