Effects of N2 pressure on properties of titanium nitride films by filter cathodic vacuum arc for bipolar plates in PEM fuel cells

• Main Authors: Pejchang D., Medhisuwakul M., Sansongsiri S.
• Format: Book Series
• Published: 2017
• Online Access: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=81255144912&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/42922
• Institution: Chiang Mai University

This research is aimed to synthesize titanium nitride (TiN) thin films on stainless steel 304 using metal vacuum arc surface coating technique. A titanium rod is used as cathode. Plasma is generated by applying the arc pulse voltage of 450 V between the electrodes in N2 atmosphere. The pressure of N2 is varied from 10-5 to 10-3 torr when compare with uncoated-stainless steel 304. The bias voltage for substrate is-1 kV. Then the properties of the films are investigated. Firstly, microstructures of TiN thin films are indentified by X-ray diffraction method (XRD) and the crosssection scanning electron microscopy (SEM) is used to measure the thickness. Secondly, the corrosion resistance is examined by electrochemical test in 1 M H2SO4 solution at 25°C. The electrical resistivity is analyzed by interfacial contact resistance measurements. © (2012) Trans Tech Publications, Switzerland.