Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method

© 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO2) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,00...

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Bibliographic Details
Main Authors: Sakon Sansongsiri, Somchai Thongtem
Format: Journal
Published: 2018
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Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013272368&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/55928
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Institution: Chiang Mai University