Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method

© 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO2) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,00...

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Main Authors:	Sakon Sansongsiri, Somchai Thongtem
Format:	Journal
Published:	2018
Subjects:	Materials Science
Online Access:	https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013272368&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/55928
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Institution:	Chiang Mai University

id	th-cmuir.6653943832-55928
record_format	dspace
spelling	th-cmuir.6653943832-559282018-09-05T03:05:09Z Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method Sakon Sansongsiri Somchai Thongtem Materials Science © 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO2) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,000 pulses and the anatase film thickness was 13.0-37.5 nm. In this research, the roughness was increased with the increasing in the number of deposition pulses and film thickness. The transmission at 600 nm wavelength was 65-85%, decreasing with the film thickness, and the optical energy gap was in the range of 3.55-3.65 eV. 2018-09-05T03:05:09Z 2018-09-05T03:05:09Z 2016-01-01 Journal 12299162 2-s2.0-85013272368 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013272368&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/55928
institution	Chiang Mai University
building	Chiang Mai University Library
country	Thailand
collection	CMU Intellectual Repository
topic	Materials Science
spellingShingle	Materials Science Sakon Sansongsiri Somchai Thongtem Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
description	© 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO2) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,000 pulses and the anatase film thickness was 13.0-37.5 nm. In this research, the roughness was increased with the increasing in the number of deposition pulses and film thickness. The transmission at 600 nm wavelength was 65-85%, decreasing with the film thickness, and the optical energy gap was in the range of 3.55-3.65 eV.
format	Journal
author	Sakon Sansongsiri Somchai Thongtem
author_facet	Sakon Sansongsiri Somchai Thongtem
author_sort	Sakon Sansongsiri
title	Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
title_short	Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
title_full	Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
title_fullStr	Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
title_full_unstemmed	Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
title_sort	structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
publishDate	2018
url	https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013272368&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/55928
_version_	1681424596894482432

Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method

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