Thermal conductivity of titanium aluminum silicon nitride coatings deposited by lateral rotating cathode arc

• Main Authors: Ding, X. Z., Cheong, J. Y., Samani, M. K., Amini, Shahrouz, Khosravian, Narjes, Tay, Beng Kang, Chen, Gang
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2013
• 主題: DRNTU::Engineering::Materials
• 在線閱讀: https://hdl.handle.net/10356/98732; http://hdl.handle.net/10220/17477
• 機構: Nanyang Technological University

A series of physical vapour deposition titanium aluminum silicon nitride nanocomposite coating with a different (Al + Si)/Ti atomic ratio, with a thickness of around 2.5 μm were deposited on stainless steel substrate by a lateral rotating cathode arc process in a flowing nitrogen atmosphere. The com...