Fabrication and plasma resistance properties of transparent YAG ceramics

High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass...

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Main Authors: Qin, Xianpeng, Zhou, Guohong, Yang, Hao, Wong, Jen It, Zhang, Jian, Luo, Dewei, Wang, Shiwei, Ma, Jan, Tang, Dingyuan
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/99521
http://hdl.handle.net/10220/12829
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-995212020-06-01T10:13:33Z Fabrication and plasma resistance properties of transparent YAG ceramics Qin, Xianpeng Zhou, Guohong Yang, Hao Wong, Jen It Zhang, Jian Luo, Dewei Wang, Shiwei Ma, Jan Tang, Dingyuan School of Electrical and Electronic Engineering School of Materials Science & Engineering Temasek Laboratories High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz. 2013-08-02T02:51:47Z 2019-12-06T20:08:19Z 2013-08-02T02:51:47Z 2019-12-06T20:08:19Z 2011 2011 Journal Article Qin, X., Zhou, G., Yang, H., Wong, J. I., Zhang, J., Luo, D., Wang, S., Ma, J.,& Tang, D. (2012). Fabrication and plasma resistance properties of transparent YAG ceramics. Ceramics International, 38(3), 2529-2535. 0272-8842 https://hdl.handle.net/10356/99521 http://hdl.handle.net/10220/12829 10.1016/j.ceramint.2011.11.023 en Ceramics International
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
description High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Qin, Xianpeng
Zhou, Guohong
Yang, Hao
Wong, Jen It
Zhang, Jian
Luo, Dewei
Wang, Shiwei
Ma, Jan
Tang, Dingyuan
format Article
author Qin, Xianpeng
Zhou, Guohong
Yang, Hao
Wong, Jen It
Zhang, Jian
Luo, Dewei
Wang, Shiwei
Ma, Jan
Tang, Dingyuan
spellingShingle Qin, Xianpeng
Zhou, Guohong
Yang, Hao
Wong, Jen It
Zhang, Jian
Luo, Dewei
Wang, Shiwei
Ma, Jan
Tang, Dingyuan
Fabrication and plasma resistance properties of transparent YAG ceramics
author_sort Qin, Xianpeng
title Fabrication and plasma resistance properties of transparent YAG ceramics
title_short Fabrication and plasma resistance properties of transparent YAG ceramics
title_full Fabrication and plasma resistance properties of transparent YAG ceramics
title_fullStr Fabrication and plasma resistance properties of transparent YAG ceramics
title_full_unstemmed Fabrication and plasma resistance properties of transparent YAG ceramics
title_sort fabrication and plasma resistance properties of transparent yag ceramics
publishDate 2013
url https://hdl.handle.net/10356/99521
http://hdl.handle.net/10220/12829
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