Fabrication and plasma resistance properties of transparent YAG ceramics
High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass...
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sg-ntu-dr.10356-995212020-06-01T10:13:33Z Fabrication and plasma resistance properties of transparent YAG ceramics Qin, Xianpeng Zhou, Guohong Yang, Hao Wong, Jen It Zhang, Jian Luo, Dewei Wang, Shiwei Ma, Jan Tang, Dingyuan School of Electrical and Electronic Engineering School of Materials Science & Engineering Temasek Laboratories High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz. 2013-08-02T02:51:47Z 2019-12-06T20:08:19Z 2013-08-02T02:51:47Z 2019-12-06T20:08:19Z 2011 2011 Journal Article Qin, X., Zhou, G., Yang, H., Wong, J. I., Zhang, J., Luo, D., Wang, S., Ma, J.,& Tang, D. (2012). Fabrication and plasma resistance properties of transparent YAG ceramics. Ceramics International, 38(3), 2529-2535. 0272-8842 https://hdl.handle.net/10356/99521 http://hdl.handle.net/10220/12829 10.1016/j.ceramint.2011.11.023 en Ceramics International |
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High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz. |
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School of Electrical and Electronic Engineering |
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School of Electrical and Electronic Engineering Qin, Xianpeng Zhou, Guohong Yang, Hao Wong, Jen It Zhang, Jian Luo, Dewei Wang, Shiwei Ma, Jan Tang, Dingyuan |
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Article |
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Qin, Xianpeng Zhou, Guohong Yang, Hao Wong, Jen It Zhang, Jian Luo, Dewei Wang, Shiwei Ma, Jan Tang, Dingyuan |
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Qin, Xianpeng Zhou, Guohong Yang, Hao Wong, Jen It Zhang, Jian Luo, Dewei Wang, Shiwei Ma, Jan Tang, Dingyuan Fabrication and plasma resistance properties of transparent YAG ceramics |
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Qin, Xianpeng |
title |
Fabrication and plasma resistance properties of transparent YAG ceramics |
title_short |
Fabrication and plasma resistance properties of transparent YAG ceramics |
title_full |
Fabrication and plasma resistance properties of transparent YAG ceramics |
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Fabrication and plasma resistance properties of transparent YAG ceramics |
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Fabrication and plasma resistance properties of transparent YAG ceramics |
title_sort |
fabrication and plasma resistance properties of transparent yag ceramics |
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2013 |
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https://hdl.handle.net/10356/99521 http://hdl.handle.net/10220/12829 |
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