Fabrication and plasma resistance properties of transparent YAG ceramics

High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass...

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Bibliographic Details
Main Authors: Qin, Xianpeng, Zhou, Guohong, Yang, Hao, Wong, Jen It, Zhang, Jian, Luo, Dewei, Wang, Shiwei, Ma, Jan, Tang, Dingyuan
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/99521
http://hdl.handle.net/10220/12829
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Institution: Nanyang Technological University
Language: English
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