Fabrication and plasma resistance properties of transparent YAG ceramics
High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass...
Saved in:
Main Authors: | , , , , , , , , |
---|---|
Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2013
|
Online Access: | https://hdl.handle.net/10356/99521 http://hdl.handle.net/10220/12829 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
Be the first to leave a comment!