Fabrication and plasma resistance properties of transparent YAG ceramics

• Main Authors: Qin, Xianpeng, Zhou, Guohong, Yang, Hao, Wong, Jen It, Zhang, Jian, Luo, Dewei, Wang, Shiwei, Ma, Jan, Tang, Dingyuan
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/99521; http://hdl.handle.net/10220/12829
• Institution: Nanyang Technological University

High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass...