Circuits design for contactless testing of nano-scale CMOS devices and circuits

• Main Authors: Yu, Xiao Peng, Lu, Zhenghao, Lim, Wei Meng, Liu, Yang, Hu, Chang Hui
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2013
• 主題: DRNTU::Engineering::Electrical and electronic engineering
• 在線閱讀: https://hdl.handle.net/10356/99587; http://hdl.handle.net/10220/13663

In this letter, a contactless testing system for nano-scale CMOS devices is presented. It includes parameter-specific ring oscillators, modulator and demodulator with capacitive coupling, which can be fully integrated in a standard CMOS technology. These ring oscillators are used to monitor process...