Circuits design for contactless testing of nano-scale CMOS devices and circuits

• Main Authors: Yu, Xiao Peng, Lu, Zhenghao, Lim, Wei Meng, Liu, Yang, Hu, Chang Hui
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/99587; http://hdl.handle.net/10220/13663
• Institution: Nanyang Technological University

In this letter, a contactless testing system for nano-scale CMOS devices is presented. It includes parameter-specific ring oscillators, modulator and demodulator with capacitive coupling, which can be fully integrated in a standard CMOS technology. These ring oscillators are used to monitor process...