Fiber profilometer for measurement of hard-to-access areas
A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is...
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Main Authors: | , , , , |
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格式: | Conference or Workshop Item |
語言: | English |
出版: |
2013
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在線閱讀: | https://hdl.handle.net/10356/99689 http://hdl.handle.net/10220/10070 |
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