Fiber profilometer for measurement of hard-to-access areas

A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is...

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書目詳細資料
Main Authors: Liu, Zhuang, Yu, Xia, Wang, Qi Jie, Kok, Shaw Wei, Zhang, Ying
其他作者: School of Electrical and Electronic Engineering
格式: Conference or Workshop Item
語言:English
出版: 2013
主題:
在線閱讀:https://hdl.handle.net/10356/99689
http://hdl.handle.net/10220/10070
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