Fiber profilometer for measurement of hard-to-access areas

A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is...

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Main Authors:	Liu, Zhuang, Yu, Xia, Wang, Qi Jie, Kok, Shaw Wei, Zhang, Ying
Other Authors:	School of Electrical and Electronic Engineering
Format:	Conference or Workshop Item
Language:	English
Published:	2013
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
Online Access:	https://hdl.handle.net/10356/99689 http://hdl.handle.net/10220/10070
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-99689
record_format	dspace
spelling	sg-ntu-dr.10356-996892020-03-07T13:24:49Z Fiber profilometer for measurement of hard-to-access areas Liu, Zhuang Yu, Xia Wang, Qi Jie Kok, Shaw Wei Zhang, Ying School of Electrical and Electronic Engineering High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications (2nd : 2013 : San Francisco, USA) DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is proposed to obtain an optimized lateral resolution. The performance of the profilometer system is demonstrated by experimental studies. Published version 2013-06-07T03:51:26Z 2019-12-06T20:10:22Z 2013-06-07T03:51:26Z 2019-12-06T20:10:22Z 2013 2013 Conference Paper Liu, Z., Yu, X., Wang, Q. J., Kok, S. W., & Zhang, Y. (2013). Fiber profilometer for measurement of hard-to-access areas. Proceedings of SPIE-High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II, 8603. https://hdl.handle.net/10356/99689 http://hdl.handle.net/10220/10070 10.1117/12.2003784 en © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE-High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II and is made available as an electronic reprint (preprint) with permission of Society of Photo-Optical Instrumentation Engineers (SPIE). The paper can be found at the following official DOI: [http://dx.doi.org/10.1117/12.2003784]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. application/pdf
institution	Nanyang Technological University
building	NTU Library
country	Singapore
collection	DR-NTU
language	English
topic	DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio Liu, Zhuang Yu, Xia Wang, Qi Jie Kok, Shaw Wei Zhang, Ying Fiber profilometer for measurement of hard-to-access areas
description	A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is proposed to obtain an optimized lateral resolution. The performance of the profilometer system is demonstrated by experimental studies.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Liu, Zhuang Yu, Xia Wang, Qi Jie Kok, Shaw Wei Zhang, Ying
format	Conference or Workshop Item
author	Liu, Zhuang Yu, Xia Wang, Qi Jie Kok, Shaw Wei Zhang, Ying
author_sort	Liu, Zhuang
title	Fiber profilometer for measurement of hard-to-access areas
title_short	Fiber profilometer for measurement of hard-to-access areas
title_full	Fiber profilometer for measurement of hard-to-access areas
title_fullStr	Fiber profilometer for measurement of hard-to-access areas
title_full_unstemmed	Fiber profilometer for measurement of hard-to-access areas
title_sort	fiber profilometer for measurement of hard-to-access areas
publishDate	2013
url	https://hdl.handle.net/10356/99689 http://hdl.handle.net/10220/10070
_version_	1681042430356357120

Fiber profilometer for measurement of hard-to-access areas

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