Fiber profilometer for measurement of hard-to-access areas

• Main Authors: Liu, Zhuang, Yu, Xia, Wang, Qi Jie, Kok, Shaw Wei, Zhang, Ying
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
• Online Access: https://hdl.handle.net/10356/99689; http://hdl.handle.net/10220/10070
• Institution: Nanyang Technological University

A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is...