Novel fiducial grid for X-ray masks

Proceedings of SPIE - The International Society for Optical Engineering

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Main Authors: Soo, C.P., Chandra, S., Kong, J.R., Bourdillon, A.J., Lu, B.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/107144
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1071442015-01-16T09:53:48Z Novel fiducial grid for X-ray masks Soo, C.P. Chandra, S. Kong, J.R. Bourdillon, A.J. Lu, B. MATERIALS SCIENCE Proceedings of SPIE - The International Society for Optical Engineering 3676 I 63-69 PSISD 2014-10-29T08:40:01Z 2014-10-29T08:40:01Z 1999 Article Soo, C.P.,Chandra, S.,Kong, J.R.,Bourdillon, A.J.,Lu, B. (1999). Novel fiducial grid for X-ray masks. Proceedings of SPIE - The International Society for Optical Engineering 3676 (I) : 63-69. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/107144 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Proceedings of SPIE - The International Society for Optical Engineering
author2 MATERIALS SCIENCE
author_facet MATERIALS SCIENCE
Soo, C.P.
Chandra, S.
Kong, J.R.
Bourdillon, A.J.
Lu, B.
format Article
author Soo, C.P.
Chandra, S.
Kong, J.R.
Bourdillon, A.J.
Lu, B.
spellingShingle Soo, C.P.
Chandra, S.
Kong, J.R.
Bourdillon, A.J.
Lu, B.
Novel fiducial grid for X-ray masks
author_sort Soo, C.P.
title Novel fiducial grid for X-ray masks
title_short Novel fiducial grid for X-ray masks
title_full Novel fiducial grid for X-ray masks
title_fullStr Novel fiducial grid for X-ray masks
title_full_unstemmed Novel fiducial grid for X-ray masks
title_sort novel fiducial grid for x-ray masks
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/107144
_version_ 1681093591621959680