Novel fiducial grid for X-ray masks
Proceedings of SPIE - The International Society for Optical Engineering
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Main Authors: | Soo, C.P., Chandra, S., Kong, J.R., Bourdillon, A.J., Lu, B. |
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Other Authors: | MATERIALS SCIENCE |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/107144 |
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Institution: | National University of Singapore |
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