$A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing$

A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing

10.1088/0022-3727/33/17/307

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Bibliographic Details
Main Authors:	Bourdillon, A.J., Boothroyd, C.B., Kong, J.R., Vladimirsky, Y.
Other Authors:	SINGAPORE SYNCHROTRON LIGHT SOURCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/52747
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Institution:	National University of Singapore

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