A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing
10.1088/0022-3727/33/17/307
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sg-nus-scholar.10635-527472023-10-26T07:21:31Z A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing Bourdillon, A.J. Boothroyd, C.B. Kong, J.R. Vladimirsky, Y. SINGAPORE SYNCHROTRON LIGHT SOURCE MATERIALS SCIENCE 10.1088/0022-3727/33/17/307 Journal of Physics D: Applied Physics 33 17 2133-2141 JPAPB 2014-05-19T02:49:29Z 2014-05-19T02:49:29Z 2000-09-07 Article Bourdillon, A.J., Boothroyd, C.B., Kong, J.R., Vladimirsky, Y. (2000-09-07). A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing. Journal of Physics D: Applied Physics 33 (17) : 2133-2141. ScholarBank@NUS Repository. https://doi.org/10.1088/0022-3727/33/17/307 00223727 http://scholarbank.nus.edu.sg/handle/10635/52747 000089436700011 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1088/0022-3727/33/17/307 |
| author2 |
SINGAPORE SYNCHROTRON LIGHT SOURCE |
| author_facet |
SINGAPORE SYNCHROTRON LIGHT SOURCE Bourdillon, A.J. Boothroyd, C.B. Kong, J.R. Vladimirsky, Y. |
| format |
Article |
| author |
Bourdillon, A.J. Boothroyd, C.B. Kong, J.R. Vladimirsky, Y. |
| spellingShingle |
Bourdillon, A.J. Boothroyd, C.B. Kong, J.R. Vladimirsky, Y. A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing |
| author_sort |
Bourdillon, A.J. |
| title |
A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing |
| title_short |
A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing |
| title_full |
A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing |
| title_fullStr |
A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing |
| title_full_unstemmed |
A critical condition in Fresnel diffraction used for ultra-high resolution lithographic printing |
| title_sort |
critical condition in fresnel diffraction used for ultra-high resolution lithographic printing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/52747 |
| _version_ |
1781411797945810944 |