Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

10.1016/j.nimb.2009.03.103

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Bibliographic Details
Main Authors:	Yue, W., Ren, Y., van Kan, J.A., Chiam, S.-Y., Jian, L., Moser, H.O., Osipowicz, T., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Au microstructure Electroplating High aspect ratio Proton beam writing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/112636
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-112636
record_format	dspace
spelling	sg-nus-scholar.10635-1126362023-10-26T08:56:33Z Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures Yue, W. Ren, Y. van Kan, J.A. Chiam, S.-Y. Jian, L. Moser, H.O. Osipowicz, T. Watt, F. PHYSICS SINGAPORE SYNCHROTRON LIGHT SOURCE NUS NANOSCIENCE & NANOTECH INITIATIVE Au microstructure Electroplating High aspect ratio Proton beam writing 10.1016/j.nimb.2009.03.103 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 14 2376-2380 NIMBE 2014-11-28T06:33:45Z 2014-11-28T06:33:45Z 2009-07-01 Article Yue, W., Ren, Y., van Kan, J.A., Chiam, S.-Y., Jian, L., Moser, H.O., Osipowicz, T., Watt, F. (2009-07-01). Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (14) : 2376-2380. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.03.103 0168583X http://scholarbank.nus.edu.sg/handle/10635/112636 000268268000008 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Au microstructure Electroplating High aspect ratio Proton beam writing
spellingShingle	Au microstructure Electroplating High aspect ratio Proton beam writing Yue, W. Ren, Y. van Kan, J.A. Chiam, S.-Y. Jian, L. Moser, H.O. Osipowicz, T. Watt, F. Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
description	10.1016/j.nimb.2009.03.103
author2	PHYSICS
author_facet	PHYSICS Yue, W. Ren, Y. van Kan, J.A. Chiam, S.-Y. Jian, L. Moser, H.O. Osipowicz, T. Watt, F.
format	Article
author	Yue, W. Ren, Y. van Kan, J.A. Chiam, S.-Y. Jian, L. Moser, H.O. Osipowicz, T. Watt, F.
author_sort	Yue, W.
title	Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
title_short	Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
title_full	Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
title_fullStr	Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
title_full_unstemmed	Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
title_sort	proton beam writing and electroplating for the fabrication of high aspect ratio au microstructures
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/112636
_version_	1781789108766507008

Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

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