Characterization of TiAl alloy films for potential application in MEMS bimorph actuators

Characterization of TiAl alloy films for potential application in MEMS bimorph actuators

10.1016/S1369-8001(02)00055-0

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Bibliographic Details
Main Authors: Qu, X.X., Zhang, Q.X., Zou, Q.B., Balasubramanian, N., Yang, P., Zeng, K.Y.
Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113010
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/113010

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