Characterization of TiAl alloy films for potential application in MEMS bimorph actuators
10.1016/S1369-8001(02)00055-0
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2014
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sg-nus-scholar.10635-1130102023-10-26T09:43:28Z Characterization of TiAl alloy films for potential application in MEMS bimorph actuators Qu, X.X. Zhang, Q.X. Zou, Q.B. Balasubramanian, N. Yang, P. Zeng, K.Y. SINGAPORE SYNCHROTRON LIGHT SOURCE 10.1016/S1369-8001(02)00055-0 Materials Science in Semiconductor Processing 5 1 35-38 2014-11-28T08:43:12Z 2014-11-28T08:43:12Z 2002-02 Article Qu, X.X., Zhang, Q.X., Zou, Q.B., Balasubramanian, N., Yang, P., Zeng, K.Y. (2002-02). Characterization of TiAl alloy films for potential application in MEMS bimorph actuators. Materials Science in Semiconductor Processing 5 (1) : 35-38. ScholarBank@NUS Repository. https://doi.org/10.1016/S1369-8001(02)00055-0 13698001 http://scholarbank.nus.edu.sg/handle/10635/113010 000178682000008 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1016/S1369-8001(02)00055-0 |
| author2 |
SINGAPORE SYNCHROTRON LIGHT SOURCE |
| author_facet |
SINGAPORE SYNCHROTRON LIGHT SOURCE Qu, X.X. Zhang, Q.X. Zou, Q.B. Balasubramanian, N. Yang, P. Zeng, K.Y. |
| format |
Article |
| author |
Qu, X.X. Zhang, Q.X. Zou, Q.B. Balasubramanian, N. Yang, P. Zeng, K.Y. |
| spellingShingle |
Qu, X.X. Zhang, Q.X. Zou, Q.B. Balasubramanian, N. Yang, P. Zeng, K.Y. Characterization of TiAl alloy films for potential application in MEMS bimorph actuators |
| author_sort |
Qu, X.X. |
| title |
Characterization of TiAl alloy films for potential application in MEMS bimorph actuators |
| title_short |
Characterization of TiAl alloy films for potential application in MEMS bimorph actuators |
| title_full |
Characterization of TiAl alloy films for potential application in MEMS bimorph actuators |
| title_fullStr |
Characterization of TiAl alloy films for potential application in MEMS bimorph actuators |
| title_full_unstemmed |
Characterization of TiAl alloy films for potential application in MEMS bimorph actuators |
| title_sort |
characterization of tial alloy films for potential application in mems bimorph actuators |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113010 |
| _version_ |
1781789148211838976 |