Direct formation of C54 phase on the basis of C40 TiSi2 and its applications in deep sub-micron technology

Direct formation of C54 phase on the basis of C40 TiSi2 and its applications in deep sub-micron technology

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113112
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Institution: National University of Singapore
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Summary:Materials Research Society Symposium - Proceedings

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