Synthesis of pure C40 TiSi2 for Si wafer fabrication

Synthesis of pure C40 TiSi2 for Si wafer fabrication

10.1117/12.456893

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Bibliographic Details
Main Authors: Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
0.1 μm technology
C40 TiSi2
Laser thermal processing (LTP)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113120
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Institution: National University of Singapore
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Summary:10.1117/12.456893

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