Synthesis of pure C40 TiSi2 for Si wafer fabrication

10.1117/12.456893

Saved in:
Bibliographic Details
Main Authors: Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113120
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-113120
record_format dspace
spelling sg-nus-scholar.10635-1131202023-10-26T21:48:42Z Synthesis of pure C40 TiSi2 for Si wafer fabrication Chen, S.Y. Shen, Z.X. Xu, S.Y. See, A.K. Chan, L.H. Li, W.S. PHYSICS INSTITUTE OF ENGINEERING SCIENCE 0.1 μm technology C40 TiSi2 Laser thermal processing (LTP) 10.1117/12.456893 Proceedings of SPIE - The International Society for Optical Engineering 4426 272-275 PSISD 2014-11-28T09:12:15Z 2014-11-28T09:12:15Z 2002 Conference Paper Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S. (2002). Synthesis of pure C40 TiSi2 for Si wafer fabrication. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 272-275. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456893 0277786X http://scholarbank.nus.edu.sg/handle/10635/113120 000176422100061 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic 0.1 μm technology
C40 TiSi2
Laser thermal processing (LTP)
spellingShingle 0.1 μm technology
C40 TiSi2
Laser thermal processing (LTP)
Chen, S.Y.
Shen, Z.X.
Xu, S.Y.
See, A.K.
Chan, L.H.
Li, W.S.
Synthesis of pure C40 TiSi2 for Si wafer fabrication
description 10.1117/12.456893
author2 PHYSICS
author_facet PHYSICS
Chen, S.Y.
Shen, Z.X.
Xu, S.Y.
See, A.K.
Chan, L.H.
Li, W.S.
format Conference or Workshop Item
author Chen, S.Y.
Shen, Z.X.
Xu, S.Y.
See, A.K.
Chan, L.H.
Li, W.S.
author_sort Chen, S.Y.
title Synthesis of pure C40 TiSi2 for Si wafer fabrication
title_short Synthesis of pure C40 TiSi2 for Si wafer fabrication
title_full Synthesis of pure C40 TiSi2 for Si wafer fabrication
title_fullStr Synthesis of pure C40 TiSi2 for Si wafer fabrication
title_full_unstemmed Synthesis of pure C40 TiSi2 for Si wafer fabrication
title_sort synthesis of pure c40 tisi2 for si wafer fabrication
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/113120
_version_ 1781789169752735744