Synthesis of pure C40 TiSi2 for Si wafer fabrication
10.1117/12.456893
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2014
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sg-nus-scholar.10635-1131202023-10-26T21:48:42Z Synthesis of pure C40 TiSi2 for Si wafer fabrication Chen, S.Y. Shen, Z.X. Xu, S.Y. See, A.K. Chan, L.H. Li, W.S. PHYSICS INSTITUTE OF ENGINEERING SCIENCE 0.1 μm technology C40 TiSi2 Laser thermal processing (LTP) 10.1117/12.456893 Proceedings of SPIE - The International Society for Optical Engineering 4426 272-275 PSISD 2014-11-28T09:12:15Z 2014-11-28T09:12:15Z 2002 Conference Paper Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S. (2002). Synthesis of pure C40 TiSi2 for Si wafer fabrication. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 272-275. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456893 0277786X http://scholarbank.nus.edu.sg/handle/10635/113120 000176422100061 Scopus |
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0.1 μm technology C40 TiSi2 Laser thermal processing (LTP) |
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0.1 μm technology C40 TiSi2 Laser thermal processing (LTP) Chen, S.Y. Shen, Z.X. Xu, S.Y. See, A.K. Chan, L.H. Li, W.S. Synthesis of pure C40 TiSi2 for Si wafer fabrication |
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10.1117/12.456893 |
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PHYSICS |
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PHYSICS Chen, S.Y. Shen, Z.X. Xu, S.Y. See, A.K. Chan, L.H. Li, W.S. |
format |
Conference or Workshop Item |
author |
Chen, S.Y. Shen, Z.X. Xu, S.Y. See, A.K. Chan, L.H. Li, W.S. |
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Chen, S.Y. |
title |
Synthesis of pure C40 TiSi2 for Si wafer fabrication |
title_short |
Synthesis of pure C40 TiSi2 for Si wafer fabrication |
title_full |
Synthesis of pure C40 TiSi2 for Si wafer fabrication |
title_fullStr |
Synthesis of pure C40 TiSi2 for Si wafer fabrication |
title_full_unstemmed |
Synthesis of pure C40 TiSi2 for Si wafer fabrication |
title_sort |
synthesis of pure c40 tisi2 for si wafer fabrication |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/113120 |
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1781789169752735744 |