AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams
Applied Surface Science
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2014
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sg-nus-scholar.10635-1132262024-11-12T21:17:34Z AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. PHYSICS INST OF MATERIALS RESEARCH & ENGINEERING Applied Surface Science 115 2 166-173 ASUSE 2014-11-30T06:41:10Z 2014-11-30T06:41:10Z 1997-06-01 Article Pan, J.S.,Wee, A.T.S.,Huan, C.H.A.,Tan, H.S.,Tan, K.L. (1997-06-01). AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams. Applied Surface Science 115 (2) : 166-173. ScholarBank@NUS Repository. 01694332 http://scholarbank.nus.edu.sg/handle/10635/113226 NOT_IN_WOS Scopus |
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National University of Singapore |
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Applied Surface Science |
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PHYSICS |
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PHYSICS Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. |
| format |
Article |
| author |
Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. |
| spellingShingle |
Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams |
| author_sort |
Pan, J.S. |
| title |
AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams |
| title_short |
AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams |
| title_full |
AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams |
| title_fullStr |
AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams |
| title_full_unstemmed |
AES analysis of nitridation of Si(100) by 2-10 keV N+ 2 ion beams |
| title_sort |
aes analysis of nitridation of si(100) by 2-10 kev n+ 2 ion beams |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113226 |
| _version_ |
1821209504241418240 |