Dynamic growth mechanism and interface structure of crystalline zirconia on silicon
Materials Research Society Symposium - Proceedings
Saved in:
Main Authors: | Wang, S.J., Huan, A.C.H., Ong, C.K. |
---|---|
Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/114431 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Crystalline zirconia oxide on silicon as alternative gate dielectrics
by: Wang, S.J., et al.
Published: (2014) -
Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure
by: Wang, S.J., et al.
Published: (2014) -
Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics
by: Wang, S.J., et al.
Published: (2014) -
Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer
by: Wang, S.J., et al.
Published: (2014) -
Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics
by: Wang, S.J., et al.
Published: (2014)