Activation of beryllium-implanted GaN by two-step annealing

MRS Internet Journal of Nitride Semiconductor Research

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Bibliographic Details
Main Authors: Sun, Y., Tan, L.S., Chua, S.J., Prakash, S.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/114539
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1145392015-02-02T01:04:22Z Activation of beryllium-implanted GaN by two-step annealing Sun, Y. Tan, L.S. Chua, S.J. Prakash, S. ELECTRICAL ENGINEERING MRS Internet Journal of Nitride Semiconductor Research 5 SUPPL. 1 - MIJNF 2014-12-02T08:05:50Z 2014-12-02T08:05:50Z 2000 Conference Paper Sun, Y.,Tan, L.S.,Chua, S.J.,Prakash, S. (2000). Activation of beryllium-implanted GaN by two-step annealing. MRS Internet Journal of Nitride Semiconductor Research 5 (SUPPL. 1) : -. ScholarBank@NUS Repository. 10925783 http://scholarbank.nus.edu.sg/handle/10635/114539 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description MRS Internet Journal of Nitride Semiconductor Research
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Sun, Y.
Tan, L.S.
Chua, S.J.
Prakash, S.
format Conference or Workshop Item
author Sun, Y.
Tan, L.S.
Chua, S.J.
Prakash, S.
spellingShingle Sun, Y.
Tan, L.S.
Chua, S.J.
Prakash, S.
Activation of beryllium-implanted GaN by two-step annealing
author_sort Sun, Y.
title Activation of beryllium-implanted GaN by two-step annealing
title_short Activation of beryllium-implanted GaN by two-step annealing
title_full Activation of beryllium-implanted GaN by two-step annealing
title_fullStr Activation of beryllium-implanted GaN by two-step annealing
title_full_unstemmed Activation of beryllium-implanted GaN by two-step annealing
title_sort activation of beryllium-implanted gan by two-step annealing
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/114539
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