Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)

10.1016/S1001-8042(06)60038-9

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Bibliographic Details
Main Authors:	PAN, J.S.P, LIU, R.S.L, TOK, E.S.T
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	AFM Cobalt Diffusion Growth mode Hydrogen termination Metal-semiconductor interfacial reaction Silicon Surface morphology XPS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/115885
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-115885
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spelling	sg-nus-scholar.10635-1158852015-02-02T03:37:14Z Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) PAN, J.S.P LIU, R.S.L TOK, E.S.T PHYSICS INSTITUTE OF ENGINEERING SCIENCE AFM Cobalt Diffusion Growth mode Hydrogen termination Metal-semiconductor interfacial reaction Silicon Surface morphology XPS 10.1016/S1001-8042(06)60038-9 Nuclear Science and Techniques/Hewuli 17 4 202-211 NSETE 2014-12-12T07:33:43Z 2014-12-12T07:33:43Z 2006-08 Article PAN, J.S.P,LIU, R.S.L,TOK, E.S.T (2006-08). Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). Nuclear Science and Techniques/Hewuli 17 (4) : 202-211. ScholarBank@NUS Repository. <a href="https://doi.org/10.1016/S1001-8042(06)60038-9" target="_blank">https://doi.org/10.1016/S1001-8042(06)60038-9</a> 10018042 http://scholarbank.nus.edu.sg/handle/10635/115885 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	AFM Cobalt Diffusion Growth mode Hydrogen termination Metal-semiconductor interfacial reaction Silicon Surface morphology XPS
spellingShingle	AFM Cobalt Diffusion Growth mode Hydrogen termination Metal-semiconductor interfacial reaction Silicon Surface morphology XPS PAN, J.S.P LIU, R.S.L TOK, E.S.T Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)
description	10.1016/S1001-8042(06)60038-9
author2	PHYSICS
author_facet	PHYSICS PAN, J.S.P LIU, R.S.L TOK, E.S.T
format	Article
author	PAN, J.S.P LIU, R.S.L TOK, E.S.T
author_sort	PAN, J.S.P
title	Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)
title_short	Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)
title_full	Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)
title_fullStr	Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)
title_full_unstemmed	Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)
title_sort	probing co/si interface behaviour by x-ray photoelectron spectroscopy (xps) and atomic force microscopy (afm)
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/115885
_version_	1681095066091782144

Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)

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