Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics

Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics

10.1116/1.2749526

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Bibliographic Details
Main Authors: Darmawan, P., Lee, P.S., Setiawan, Y., Lai, J.C., Yang, P.
Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/116652
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/116652

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