Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics

10.1116/1.2749526

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Main Authors:	Darmawan, P., Lee, P.S., Setiawan, Y., Lai, J.C., Yang, P.
Other Authors:	SINGAPORE SYNCHROTRON LIGHT SOURCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/116652
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-1166522023-10-30T09:21:44Z Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics Darmawan, P. Lee, P.S. Setiawan, Y. Lai, J.C. Yang, P. SINGAPORE SYNCHROTRON LIGHT SOURCE 10.1116/1.2749526 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 4 1203-1206 JVTBD 2014-12-12T07:52:30Z 2014-12-12T07:52:30Z 2007 Article Darmawan, P., Lee, P.S., Setiawan, Y., Lai, J.C., Yang, P. (2007). Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 (4) : 1203-1206. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2749526 10711023 http://scholarbank.nus.edu.sg/handle/10635/116652 000249170100019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.2749526
author2	SINGAPORE SYNCHROTRON LIGHT SOURCE
author_facet	SINGAPORE SYNCHROTRON LIGHT SOURCE Darmawan, P. Lee, P.S. Setiawan, Y. Lai, J.C. Yang, P.
format	Article
author	Darmawan, P. Lee, P.S. Setiawan, Y. Lai, J.C. Yang, P.
spellingShingle	Darmawan, P. Lee, P.S. Setiawan, Y. Lai, J.C. Yang, P. Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics
author_sort	Darmawan, P.
title	Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics
title_short	Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics
title_full	Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics
title_fullStr	Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics
title_full_unstemmed	Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics
title_sort	thermal stability of rare-earth based ultrathin lu2 o3 for high- k dielectrics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/116652
_version_	1781789546150625280

Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics

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