A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries

A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries

10.1016/j.cie.2015.04.008

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Bibliographic Details
Main Authors: Luo, Ming, Yan, Heng-Chao, Hu, Bin, Zhou, Jun-Hong, Pang, Chee Khiang
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: Elsevier 2016
Online Access:http://scholarbank.nus.edu.sg/handle/10635/123380
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Institution: National University of Singapore
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Summary:10.1016/j.cie.2015.04.008

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