A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
10.1016/j.cie.2015.04.008
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
Elsevier
2016
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/123380 |
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| Institution: | National University of Singapore |