A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries

10.1016/j.cie.2015.04.008

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Bibliographic Details
Main Authors:	Luo, Ming, Yan, Heng-Chao, Hu, Bin, Zhou, Jun-Hong, Pang, Chee Khiang
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	Elsevier 2016
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/123380
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-123380
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spelling	sg-nus-scholar.10635-1233802023-10-30T07:58:28Z A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries Luo, Ming Yan, Heng-Chao Hu, Bin Zhou, Jun-Hong Pang, Chee Khiang ELECTRICAL & COMPUTER ENGINEERING 10.1016/j.cie.2015.04.008 Computers and Industrial Engineering 85 414-422 2016-04-29T06:05:27Z 2016-04-29T06:05:27Z 2015 Article Luo, Ming, Yan, Heng-Chao, Hu, Bin, Zhou, Jun-Hong, Pang, Chee Khiang (2015). A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries. Computers and Industrial Engineering 85 : 414-422. ScholarBank@NUS Repository. https://doi.org/10.1016/j.cie.2015.04.008 03608352 http://scholarbank.nus.edu.sg/handle/10635/123380 000356111600038 Elsevier
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/j.cie.2015.04.008
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Luo, Ming Yan, Heng-Chao Hu, Bin Zhou, Jun-Hong Pang, Chee Khiang
format	Article
author	Luo, Ming Yan, Heng-Chao Hu, Bin Zhou, Jun-Hong Pang, Chee Khiang
spellingShingle	Luo, Ming Yan, Heng-Chao Hu, Bin Zhou, Jun-Hong Pang, Chee Khiang A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
author_sort	Luo, Ming
title	A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
title_short	A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
title_full	A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
title_fullStr	A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
title_full_unstemmed	A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
title_sort	data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
publisher	Elsevier
publishDate	2016
url	http://scholarbank.nus.edu.sg/handle/10635/123380
_version_	1781789764421156864

A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries

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