CMOS compatible midinfrared wavelength-selective thermopile for high temperature applications

CMOS compatible midinfrared wavelength-selective thermopile for high temperature applications

10.1109/JMEMS.2014.2322675

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Bibliographic Details
Main Authors: Zhou Huchuan, Kropelnicki Piotr, Lee Chengkun
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: Institute of Electrical and Electronics Engineers Inc. 2016
Online Access:http://scholarbank.nus.edu.sg/handle/10635/127516
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Institution: National University of Singapore
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Summary:10.1109/JMEMS.2014.2322675

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