Nonlinear effects in defect production by atomic and molecular ion implantation

10.1063/1.4905175

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Bibliographic Details
Main Authors: David, C., Varghese, Anto C., Dholakia, M., Chandra, S., Nair, K.G.M., Panigrahi, B.K., Santhana Raman, P., Amirthapandian, S., Amarendra, G., Kennedy, J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: American Institute of Physics Inc. 2016
Online Access:http://scholarbank.nus.edu.sg/handle/10635/128148
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Institution: National University of Singapore