In-situ measurement and control of photoresist processing in lithography

In-situ measurement and control of photoresist processing in lithography

Ph.D

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Bibliographic Details
Main Author: HU NI
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
lithography; semiconductor manufacturing; in-situ measurement; real-time control; temperature control; development process control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/13009
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Institution: National University of Singapore
Language: English
id sg-nus-scholar.10635-13009
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spelling sg-nus-scholar.10635-130092017-10-21T09:30:48Z In-situ measurement and control of photoresist processing in lithography HU NI ELECTRICAL & COMPUTER ENGINEERING TAY EE BENG, ARTHUR HO WENG KHUEN lithography; semiconductor manufacturing; in-situ measurement; real-time control; temperature control; development process control Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:29:11Z 2010-04-08T10:29:11Z 2007-12-26 Thesis HU NI (2007-12-26). In-situ measurement and control of photoresist processing in lithography. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13009 NOT_IN_WOS en
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
language English
topic lithography; semiconductor manufacturing; in-situ measurement; real-time control; temperature control; development process control
spellingShingle lithography; semiconductor manufacturing; in-situ measurement; real-time control; temperature control; development process control
HU NI
In-situ measurement and control of photoresist processing in lithography
description Ph.D
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
HU NI
format Theses and Dissertations
author HU NI
author_sort HU NI
title In-situ measurement and control of photoresist processing in lithography
title_short In-situ measurement and control of photoresist processing in lithography
title_full In-situ measurement and control of photoresist processing in lithography
title_fullStr In-situ measurement and control of photoresist processing in lithography
title_full_unstemmed In-situ measurement and control of photoresist processing in lithography
title_sort in-situ measurement and control of photoresist processing in lithography
publishDate 2010
url http://scholarbank.nus.edu.sg/handle/10635/13009
_version_ 1681078784390856704

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