Sputter process variables prediction via data mining

Sputter process variables prediction via data mining

2004 IEEE Conference on Cybernetics and Intelligent Systems

Saved in:
Bibliographic Details
Main Authors: Ravi, V., Shalom, S.A.A., Manickavel, A.
Other Authors: INSTITUTE OF SYSTEMS SCIENCE
Format: Conference or Workshop Item
Published: 2016
Online Access:http://scholarbank.nus.edu.sg/handle/10635/130482
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:2004 IEEE Conference on Cybernetics and Intelligent Systems

Similar Items