Sputter process variables prediction via data mining
2004 IEEE Conference on Cybernetics and Intelligent Systems
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2016
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/130482 |
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sg-nus-scholar.10635-1304822016-11-19T02:51:04Z Sputter process variables prediction via data mining Ravi, V. Shalom, S.A.A. Manickavel, A. INSTITUTE OF SYSTEMS SCIENCE 2004 IEEE Conference on Cybernetics and Intelligent Systems 256-261 2016-11-16T11:06:27Z 2016-11-16T11:06:27Z 2004 Conference Paper Ravi, V., Shalom, S.A.A., Manickavel, A. (2004). Sputter process variables prediction via data mining. 2004 IEEE Conference on Cybernetics and Intelligent Systems : 256-261. ScholarBank@NUS Repository. 0780386442 http://scholarbank.nus.edu.sg/handle/10635/130482 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
2004 IEEE Conference on Cybernetics and Intelligent Systems |
| author2 |
INSTITUTE OF SYSTEMS SCIENCE |
| author_facet |
INSTITUTE OF SYSTEMS SCIENCE Ravi, V. Shalom, S.A.A. Manickavel, A. |
| format |
Conference or Workshop Item |
| author |
Ravi, V. Shalom, S.A.A. Manickavel, A. |
| spellingShingle |
Ravi, V. Shalom, S.A.A. Manickavel, A. Sputter process variables prediction via data mining |
| author_sort |
Ravi, V. |
| title |
Sputter process variables prediction via data mining |
| title_short |
Sputter process variables prediction via data mining |
| title_full |
Sputter process variables prediction via data mining |
| title_fullStr |
Sputter process variables prediction via data mining |
| title_full_unstemmed |
Sputter process variables prediction via data mining |
| title_sort |
sputter process variables prediction via data mining |
| publishDate |
2016 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/130482 |
| _version_ |
1681096988881321984 |