Characterization of electromigration defects using scanning thermal microscopy

Master's

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Bibliographic Details
Main Author:	ZHENG XINHUA
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Interconnect, Scanning Thermal Microscopy, Temperature Distribution, Electromigration, Topographic Effects, EBID Tip Growth
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14588
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14588
record_format	dspace
spelling	sg-nus-scholar.10635-145882024-10-26T08:43:25Z Characterization of electromigration defects using scanning thermal microscopy ZHENG XINHUA ELECTRICAL & COMPUTER ENGINEERING PHANG C H, JACOB Interconnect, Scanning Thermal Microscopy, Temperature Distribution, Electromigration, Topographic Effects, EBID Tip Growth Master's MASTER OF ENGINEERING 2010-04-08T10:44:42Z 2010-04-08T10:44:42Z 2005-03-24 Thesis ZHENG XINHUA (2005-03-24). Characterization of electromigration defects using scanning thermal microscopy. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14588 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Interconnect, Scanning Thermal Microscopy, Temperature Distribution, Electromigration, Topographic Effects, EBID Tip Growth
spellingShingle	Interconnect, Scanning Thermal Microscopy, Temperature Distribution, Electromigration, Topographic Effects, EBID Tip Growth ZHENG XINHUA Characterization of electromigration defects using scanning thermal microscopy
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING ZHENG XINHUA
format	Theses and Dissertations
author	ZHENG XINHUA
author_sort	ZHENG XINHUA
title	Characterization of electromigration defects using scanning thermal microscopy
title_short	Characterization of electromigration defects using scanning thermal microscopy
title_full	Characterization of electromigration defects using scanning thermal microscopy
title_fullStr	Characterization of electromigration defects using scanning thermal microscopy
title_full_unstemmed	Characterization of electromigration defects using scanning thermal microscopy
title_sort	characterization of electromigration defects using scanning thermal microscopy
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/14588
_version_	1821222391573905408

Characterization of electromigration defects using scanning thermal microscopy

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