Design, simulation and fabrication of ultra thin fin for double gate MOSFETS
Master's
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2010
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/14621 |
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sg-nus-scholar.10635-146212020-11-18T05:00:57Z Design, simulation and fabrication of ultra thin fin for double gate MOSFETS AGRAWAL NAVEEN ELECTRICAL & COMPUTER ENGINEERING SAMUDRA, GANESH S FinFET, Tapering, PSM, Spacer Patterning, Taurus3D, Prolith3D Master's MASTER OF ENGINEERING 2010-04-08T10:45:05Z 2010-04-08T10:45:05Z 2005-05-04 Thesis AGRAWAL NAVEEN (2005-05-04). Design, simulation and fabrication of ultra thin fin for double gate MOSFETS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/14621 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
FinFET, Tapering, PSM, Spacer Patterning, Taurus3D, Prolith3D |
| spellingShingle |
FinFET, Tapering, PSM, Spacer Patterning, Taurus3D, Prolith3D AGRAWAL NAVEEN Design, simulation and fabrication of ultra thin fin for double gate MOSFETS |
| description |
Master's |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING AGRAWAL NAVEEN |
| format |
Theses and Dissertations |
| author |
AGRAWAL NAVEEN |
| author_sort |
AGRAWAL NAVEEN |
| title |
Design, simulation and fabrication of ultra thin fin for double gate MOSFETS |
| title_short |
Design, simulation and fabrication of ultra thin fin for double gate MOSFETS |
| title_full |
Design, simulation and fabrication of ultra thin fin for double gate MOSFETS |
| title_fullStr |
Design, simulation and fabrication of ultra thin fin for double gate MOSFETS |
| title_full_unstemmed |
Design, simulation and fabrication of ultra thin fin for double gate MOSFETS |
| title_sort |
design, simulation and fabrication of ultra thin fin for double gate mosfets |
| publishDate |
2010 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/14621 |
| _version_ |
1684664528558620672 |