3D simulation and fabrication of multiple-gate device

Master's

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Bibliographic Details
Main Author:	TEE KIAN MENG
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	SOI, corner rounding, multiple gate devices, FINFET, gate all around devices, pseudo 3D simulation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14982
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14982
record_format	dspace
spelling	sg-nus-scholar.10635-149822017-10-21T09:36:14Z 3D simulation and fabrication of multiple-gate device TEE KIAN MENG ELECTRICAL & COMPUTER ENGINEERING SAMUDRA, GANESH S SOI, corner rounding, multiple gate devices, FINFET, gate all around devices, pseudo 3D simulation Master's MASTER OF ENGINEERING 2010-04-08T10:48:52Z 2010-04-08T10:48:52Z 2005-09-13 Thesis TEE KIAN MENG (2005-09-13). 3D simulation and fabrication of multiple-gate device. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14982 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	SOI, corner rounding, multiple gate devices, FINFET, gate all around devices, pseudo 3D simulation
spellingShingle	SOI, corner rounding, multiple gate devices, FINFET, gate all around devices, pseudo 3D simulation TEE KIAN MENG 3D simulation and fabrication of multiple-gate device
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING TEE KIAN MENG
format	Theses and Dissertations
author	TEE KIAN MENG
author_sort	TEE KIAN MENG
title	3D simulation and fabrication of multiple-gate device
title_short	3D simulation and fabrication of multiple-gate device
title_full	3D simulation and fabrication of multiple-gate device
title_fullStr	3D simulation and fabrication of multiple-gate device
title_full_unstemmed	3D simulation and fabrication of multiple-gate device
title_sort	3d simulation and fabrication of multiple-gate device
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/14982
_version_	1681079118203977728

3D simulation and fabrication of multiple-gate device

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