3D simulation and fabrication of multiple-gate device

3D simulation and fabrication of multiple-gate device

Master's

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Bibliographic Details
Main Author:	TEE KIAN MENG
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	SOI, corner rounding, multiple gate devices, FINFET, gate all around devices, pseudo 3D simulation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14982
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore
Language:	English

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