THE FABRICATION AND CHARACTERIZATION OF FINFET

• Main Author: NARAYANAN T V
• Other Authors: SINGAPORE-MIT ALLIANCE
• Format: Theses and Dissertations
• Published: 2019
• Subjects: Non-classical structures; double gate structure; FinFET; Short channel effect; Fin; Spacer patterning; SOI; Subthreshold swing
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/154129
• Institution: National University of Singapore

Master's