THE FABRICATION AND CHARACTERIZATION OF FINFET
Master's
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2019
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sg-nus-scholar.10635-1541292024-10-26T00:13:58Z THE FABRICATION AND CHARACTERIZATION OF FINFET NARAYANAN T V SINGAPORE-MIT ALLIANCE JAGAR SINGH Non-classical structures double gate structure FinFET Short channel effect Fin Spacer patterning SOI Subthreshold swing Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS Dissertation Advisor: 1. Dr. Wu Ping, SMA Fellow, Adjunct Professor, NUS, IME Project Supervisor: 1.Dr. Jagar Singh, Senior Research Engineer, Institute of Microelectronics 2019-05-15T04:18:27Z 2019-05-15T04:18:27Z 2003 Thesis NARAYANAN T V (2003). THE FABRICATION AND CHARACTERIZATION OF FINFET. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154129 SMA BATCHLOAD 20190422 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Non-classical structures double gate structure FinFET Short channel effect Fin Spacer patterning SOI Subthreshold swing |
| spellingShingle |
Non-classical structures double gate structure FinFET Short channel effect Fin Spacer patterning SOI Subthreshold swing NARAYANAN T V THE FABRICATION AND CHARACTERIZATION OF FINFET |
| description |
Master's |
| author2 |
SINGAPORE-MIT ALLIANCE |
| author_facet |
SINGAPORE-MIT ALLIANCE NARAYANAN T V |
| format |
Theses and Dissertations |
| author |
NARAYANAN T V |
| author_sort |
NARAYANAN T V |
| title |
THE FABRICATION AND CHARACTERIZATION OF FINFET |
| title_short |
THE FABRICATION AND CHARACTERIZATION OF FINFET |
| title_full |
THE FABRICATION AND CHARACTERIZATION OF FINFET |
| title_fullStr |
THE FABRICATION AND CHARACTERIZATION OF FINFET |
| title_full_unstemmed |
THE FABRICATION AND CHARACTERIZATION OF FINFET |
| title_sort |
fabrication and characterization of finfet |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/154129 |
| _version_ |
1821215090145230848 |